Inductively coupled plasma sources from Plasma ALD, LLC.


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Kenneth E. Goodson Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kenneth E. Goodson returned 3 record(s).

NumberTitle
1Thermal Interface Enhancement via Inclusion of an Adhesive Layer Using Plasma-Enhanced Atomic Layer Deposition
2Dielectric barrier layers by low-temperature plasma-enhanced atomic layer deposition of silicon dioxide
3Thermal conductivity measurement of amorphous dielectric multilayers for phase-change memory power reduction