Kenneth E. Goodson Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kenneth E. Goodson returned 3 record(s).

Number	Title
1	Dielectric barrier layers by low-temperature plasma-enhanced atomic layer deposition of silicon dioxide
2	Thermal conductivity measurement of amorphous dielectric multilayers for phase-change memory power reduction
3	Thermal Interface Enhancement via Inclusion of an Adhesive Layer Using Plasma-Enhanced Atomic Layer Deposition