Inductively coupled plasma sources from Plasma ALD, LLC.


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S. W. Glunz Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by S. W. Glunz returned 2 record(s).

NumberTitle
1Firing Stable Al2O3/SiNx Layer Stack Passivation for the Front Side Boron Emitter of n-type Silicon Solar Cells
2Electron-selective contacts via ultra-thin organic interface dipoles for silicon organic heterojunction solar cells