Inductively coupled plasma sources from Plasma ALD, LLC.


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J. Benick Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by J. Benick returned 2 record(s).

NumberTitle
1Minority carrier lifetime limitations in Si wafer solar cells with gallium phosphide window layers
2Firing Stable Al2O3/SiNx Layer Stack Passivation for the Front Side Boron Emitter of n-type Silicon Solar Cells