Francis J. Kub Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Francis J. Kub returned 5 record(s).

Number	Title
1	Atomic Layer Epitaxy AlN for Enhanced AlGaN/GaN HEMT Passivation
2	Practical Challenges of Processing III-Nitride/Graphene/SiC Devices
3	Investigation of AlGaN/GaN HEMTs Passivated by AlN Films Grown by Atomic Layer Epitaxy
4	Growth of AlN/Pt heterostructures on amorphous substrates at low temperatures via atomic layer epitaxy
5	ALD TiN Schottky Gates for Improved Electrical and Thermal Stability in III-N Devices