Maximilian Gebhard Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Maximilian Gebhard returned 4 record(s).

Number	Title
1	A combinatorial approach to enhance barrier properties of thin films on polymers: Seeding and capping of PECVD thin films by PEALD
2	An efficient PE-ALD process for TiO₂ thin films employing a new Ti-precursor
3	Analysis of dispersive interactions at polymer/TiAlN interfaces by means of dynamic force spectroscopy
4	PEALD of SiO₂ and Al₂O₃ Thin Films on Polypropylene: Investigations of the Film Growth at the Interface, Stress, and Gas Barrier Properties of Dyads