Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Andrew Shaw Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Andrew Shaw returned 2 record(s).

NumberTitle
1Schottky Diodes on ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
2A high speed PE-ALD ZnO Schottky diode rectifier with low interface-state density