J. L. van Hemmen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by J. L. van Hemmen returned 5 record(s).

Number	Title
1	Deposition of TiN and HfO₂ in a commercial 200 mm remote plasma atomic layer deposition reactor
2	Plasma and Thermal ALD of Al₂O₃ in a Commercial 200mm ALD Reactor
3	Reaction mechanisms during plasma-assisted atomic layer deposition of metal oxides: A case study for Al₂O₃
4	Dielectric Properties of Thermal and Plasma-Assisted Atomic Layer Deposited Al₂O₃ Thin Films
5	Optimization of Plasma Enhanced Atomic Layer Deposition Processes for Oxides, Nitrides and Metals in the Oxford Instruments FlexAL Reactor