Ke Zeng Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ke Zeng returned 2 record(s).

Number	Title
1	Ga2O3 MOSFETs Using Spin-On-Glass Source/Drain Doping Technology
2	Spectroscopic and electrical calculation of band alignment between atomic layer deposited SiO2 and β-Ga2O3 (2̅01)