S. B. S. Heil Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by S. B. S. Heil returned 13 record(s).

Number	Title
1	Plasma and Thermal ALD of Al₂O₃ in a Commercial 200mm ALD Reactor
2	In situ spectroscopic ellipsometry study on the growth of ultrathin TiN films by plasma-assisted atomic layer deposition
3	Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes
4	Ultralow surface recombination of c-Si substrates passivated by plasma-assisted atomic layer deposited Al₂O₃
5	Plasma-assisted atomic layer deposition of Ta₂O₅ from alkylamide precursor and remote O₂ plasma
6	Plasma-assisted atomic layer deposition of Al₂O₃ moisture permeation barriers on polymers
7	In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al₂O₃
8	Plasma-assisted atomic layer deposition of TiN monitored by in situ spectroscopic ellipsometry
9	Deposition of TiN and HfO₂ in a commercial 200 mm remote plasma atomic layer deposition reactor
10	Reaction mechanisms during plasma-assisted atomic layer deposition of metal oxides: A case study for Al₂O₃
11	Low-Temperature Deposition of TiN by Plasma-Assisted Atomic Layer Deposition
12	Plasma-assisted atomic layer deposition of TiN films at low deposition temperature for high-aspect ratio applications
13	Optimization of Plasma Enhanced Atomic Layer Deposition Processes for Oxides, Nitrides and Metals in the Oxford Instruments FlexAL Reactor