S. B. S. Heil Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by S. B. S. Heil returned 13 record(s).

Number	Title
1	Optimization of Plasma Enhanced Atomic Layer Deposition Processes for Oxides, Nitrides and Metals in the Oxford Instruments FlexAL Reactor
2	Plasma and Thermal ALD of Al2O3 in a Commercial 200mm ALD Reactor
3	Low-Temperature Deposition of TiN by Plasma-Assisted Atomic Layer Deposition
4	Plasma-assisted atomic layer deposition of TiN monitored by in situ spectroscopic ellipsometry
5	Deposition of TiN and HfO2 in a commercial 200 mm remote plasma atomic layer deposition reactor
6	Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes
7	Plasma-assisted atomic layer deposition of Al2O3 moisture permeation barriers on polymers
8	In situ spectroscopic ellipsometry study on the growth of ultrathin TiN films by plasma-assisted atomic layer deposition
9	Ultralow surface recombination of c-Si substrates passivated by plasma-assisted atomic layer deposited Al2O3
10	Reaction mechanisms during plasma-assisted atomic layer deposition of metal oxides: A case study for Al2O3
11	Plasma-assisted atomic layer deposition of Ta2O5 from alkylamide precursor and remote O2 plasma
12	Plasma-assisted atomic layer deposition of TiN films at low deposition temperature for high-aspect ratio applications
13	In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3