S. B. S. Heil Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by S. B. S. Heil returned 13 record(s).

NumberTitle
1Optimization of Plasma Enhanced Atomic Layer Deposition Processes for Oxides, Nitrides and Metals in the Oxford Instruments FlexAL Reactor
2Plasma and Thermal ALD of Al2O3 in a Commercial 200mm ALD Reactor
3Low-Temperature Deposition of TiN by Plasma-Assisted Atomic Layer Deposition
4Plasma-assisted atomic layer deposition of TiN monitored by in situ spectroscopic ellipsometry
5Deposition of TiN and HfO2 in a commercial 200 mm remote plasma atomic layer deposition reactor
6Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes
7Plasma-assisted atomic layer deposition of Al2O3 moisture permeation barriers on polymers
8In situ spectroscopic ellipsometry study on the growth of ultrathin TiN films by plasma-assisted atomic layer deposition
9Ultralow surface recombination of c-Si substrates passivated by plasma-assisted atomic layer deposited Al2O3
10Reaction mechanisms during plasma-assisted atomic layer deposition of metal oxides: A case study for Al2O3
11Plasma-assisted atomic layer deposition of Ta2O5 from alkylamide precursor and remote O2 plasma
12Plasma-assisted atomic layer deposition of TiN films at low deposition temperature for high-aspect ratio applications
13In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3