Inductively coupled plasma sources from Plasma ALD, LLC.


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Masakiyo Matsumura Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Masakiyo Matsumura returned 4 record(s).

NumberTitle
1Atomic layer epitaxy of germanium
2Atomic hydrogen-assisted ALE of germanium
3Gas-phase-reaction-controlled atomic-layer-epitaxy of silicon
4Hydrogen-induced abstraction mechanism of surface methyl groups in atomic-layer-epitaxy of germanium