Inductively coupled plasma sources from Plasma ALD, LLC.


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E.V. Nikitina Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by E.V. Nikitina returned 5 record(s).

NumberTitle
1n-GaP/p-Si Heterojunction Solar Cells Fabricated by PE-ALD
2Thin film GaP for solar cell application
3Study of GaP/Si Heterojunction Solar Cells
4Influence of PE-ALD of GaP on the Silicon Wafers Quality
5Low temperature plasma enhanced deposition of GaP films on Si substrate