Inductively coupled plasma sources from Plasma ALD, LLC.


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Chaitanya Krishna Ande Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Chaitanya Krishna Ande returned 2 record(s).

NumberTitle
1Role of Surface Termination in Atomic Layer Deposition of Silicon Nitride
2Area-Selective Atomic Layer Deposition of In2O3:H Using a ยต-Plasma Printer for Local Area Activation