Woojin Choi Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Woojin Choi returned 3 record(s).

Number	Title
1	Improvement of V_th Instability in Normally-Off GaN MIS-HEMTs Employing PEALD-SiN_x as an Interfacial Layer
2	Impacts of conduction band offset and border traps on V_th instability of gate recessed normally-off GaN MIS-HEMTs
3	High-Voltage and Low-Leakage-Current Gate Recessed Normally-Off GaN MIS-HEMTs With Dual Gate Insulator Employing PEALD-SiN_x/RF-Sputtered-HfO₂