Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Eun-Joo Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Eun-Joo Lee returned 2 record(s).

NumberTitle
1Lanthanum-Oxide Thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition
2Atomic Layer Deposition of La2O3 Thin Films by Using an Electron Cyclotron Resonance Plasma Source