Matti Putkonen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Matti Putkonen returned 4 record(s).

Number	Title
1	Thermal and plasma enhanced atomic layer deposition of SiO₂ using commercial silicon precursors
2	Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
3	Comparative study of ALD SiO₂ thin films for optical applications
4	Properties of AlN grown by plasma enhanced atomic layer deposition