Inductively coupled plasma sources from Plasma ALD, LLC.


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Binh-Minh Nguyen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Binh-Minh Nguyen returned 2 record(s).

NumberTitle
1Gate-tunable high mobility remote-doped InSb/In1-xAlxSb quantum well heterostructures
2Atomic layer deposition of platinum with enhanced nucleation and coalescence by trimethylaluminum pre-pulsing