Matthew A. Thomas Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Matthew A. Thomas returned 3 record(s).

Number	Title
1	Highly Tunable Electrical Properties in Undoped ZnO Grown by Plasma Enhanced Thermal-ALD
2	New approach toward transparent and conductive ZnO by atomic layer deposition: Hydrogen plasma doping
3	The Effects of an O₂ Plasma on the Optical Properties of Atomic Layer Deposited ZnO