Juan Paolo S. Bermundo Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Juan Paolo S. Bermundo returned 2 record(s).

Number	Title
1	Dimethylaluminum hydride for atomic layer deposition of Al₂O₃ passivation for amorphous InGaZnO thin-film transistors
2	Bias stress and humidity exposure of amorphous InGaZnO thin-film transistors with atomic layer deposited Al₂O₃ passivation using dimethylaluminum hydride at 200°C