Hele Savin Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hele Savin returned 3 record(s).

Number	Title
1	Influence of plasma parameters on the properties of ultrathin Al₂O₃ films prepared by plasma enhanced atomic layer deposition below 100C for moisture barrier applications
2	Low-Temperature Plasma-Enhanced Atomic Layer Deposition of SiO₂ Using Carbon Dioxide
3	Silicon surface passivation with atomic layer deposited aluminum nitride