Ying Xiong Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ying Xiong returned 2 record(s).

Number	Title
1	Effect of Al2O3 Buffer Layers on the Properties of Sputtered VO2 Thin Films
2	Tuning the phase transitions of VO2 thin films on silicon substrates using ultrathin Al2O3 as buffer layers