Svetlana Shestaeva Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Svetlana Shestaeva returned 3 record(s).

Number	Title
1	Comparative study of ALD SiO₂ thin films for optical applications
2	Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications
3	Plasma-enhanced atomic layer deposition for antireflection coatings using SiO₂ as low-refractive index material