Minh Thien Huu Ha Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Minh Thien Huu Ha returned 3 record(s).

Number	Title
1	Plasma Enhanced Atomic Layer Deposition Passivated HfO₂/AlN/In_0.53Ga_0.47As MOSCAPs With Sub-Nanometer Equivalent Oxide Thickness and Low Interface Trap Density
2	Impact of AlN Interfacial Dipole on Effective Work Function of Ni and Band Alignment of Ni/HfO₂/In_0.53Ga_0.47As Gate-Stack
3	In_0.53Ga_0.47As FinFET and GAA-FET With Remote-Plasma Treatment