Inductively coupled plasma sources from Plasma ALD, LLC.


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Jacqueline S. Wrench Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jacqueline S. Wrench returned 3 record(s).

NumberTitle
1Schottky Diodes on ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
2Atomic Layer Deposition of Niobium Nitride from Different Precursors
3A high speed PE-ALD ZnO Schottky diode rectifier with low interface-state density