Inductively coupled plasma sources from Plasma ALD, LLC.


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Brian P. Downey Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Brian P. Downey returned 2 record(s).

NumberTitle
1Understanding the effect of nitrogen plasma exposure on plasma assisted atomic layer epitaxy of InN monitored by real time grazing incidence small angle x-ray scattering
2Real-time growth study of plasma assisted atomic layer epitaxy of InN films by synchrotron x-ray methods