Brian P. Downey Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Brian P. Downey returned 2 record(s).

Number	Title
1	Understanding the effect of nitrogen plasma exposure on plasma assisted atomic layer epitaxy of InN monitored by real time grazing incidence small angle x-ray scattering
2	Real-time growth study of plasma assisted atomic layer epitaxy of InN films by synchrotron x-ray methods