Munehito Kagaya Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Munehito Kagaya returned 4 record(s).

Number	Title
1	Effect of ion energies on the film properties of titanium dioxides synthesized via plasma enhanced atomic layer deposition
2	Surface oxidation model in plasma enhanced atomic layer deposition for silicon oxide films including various aminosilane precursors
3	Experimental and numerical analysis of the effects of ion bombardment in silicon oxide (SiO₂) plasma enhanced atomic layer deposition (PEALD) processes
4	Ion energy control and its applicability to plasma enhanced atomic layer deposition for synthesizing titanium dioxide films