Wenwen Lei Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Wenwen Lei returned 3 record(s).

Number	Title
1	Plasma-Assisted ALD of an Al₂O₃ Permeation Barrier Layer on Plastic
2	Influence of magnetic field on the reaction mechanisms of plasma-assisted atomic layer deposition of Al₂O₃
3	Crystal AlN deposited at low temperature by magnetic field enhanced plasma assisted atomic layer deposition