Inductively coupled plasma sources from Plasma ALD, LLC.


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Li Wang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Li Wang returned 2 record(s).

NumberTitle
1High-resolution, high-aspect-ratio iridium-nickel composite nanoimprint molds
2Highly stable all-inorganic CsPbBr3 nanocrystals film encapsulated with alumina by plasma-enhanced atomic layer deposition