Inductively coupled plasma sources from Plasma ALD, LLC.


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Antony Premkumar Peter Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Antony Premkumar Peter returned 3 record(s).

NumberTitle
1Electrical Characteristics of p-Type Bulk Si Fin Field-Effect Transistor Using Solid-Source Doping With 1-nm Phosphosilicate Glass
2Effect of rapid thermal annealing on the mechanical stress and physico-chemical properties in plasma enhanced atomic layer deposited silicon nitride thin films
3Engineering high quality and conformal ultrathin SiNx films by PEALD for downscaled and advanced CMOS nodes