Inductively coupled plasma sources from Plasma ALD, LLC.


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Hyunjun Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hyunjun Kim returned 3 record(s).

NumberTitle
1Remote plasma atomic layer deposition of silicon nitride with bis(dimethylaminomethyl-silyl)trimethylsilyl amine and N2 plasma for gate spacer
2Plasma-enhanced atomic layer deposition of Co using Co(MeCp)2 precursor
3Plasma-enhanced atomic layer deposition of Co on metal surfaces