Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Alexandre Crisci Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Alexandre Crisci returned 3 record(s).

NumberTitle
1PEALD ZrO2 Films Deposition on TiN and Si Substrates
2Aluminum nitride thin films deposited by hydrogen plasma enhanced and thermal atomic layer deposition
3Tetragonal Zirconia Stabilization by Metal Addition for Metal-Insulator-Metal Capacitor Applications