Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Geert Rampelberg Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Geert Rampelberg returned 2 record(s).

NumberTitle
1Plasma Enhanced Atomic Layer Deposition on Powders
2Low temperature plasma-enhanced atomic layer deposition of thin vanadium nitride layers for copper diffusion barriers