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Your search for plasma enhanced atomic layer deposition publications authored by Tomohiko Mori returned 2 record(s).
| Number | Title |
|---|---|
| 1 | Band offset of Al1-xSixOy mixed oxide on GaN evaluated by hard X-ray photoelectron spectroscopy |
| 2 | Al2O3/SiO2 nanolaminate for a gate oxide in a GaN-based MOS device |