Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Yang Xia Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yang Xia returned 2 record(s).

NumberTitle
1Low temperature depositions of GaN thin films by plasma-enhanced atomic layer deposition
2TiN/AlN Nano Multilayers Film Fabricated by Plasma Enhanced Atomic Layer Deposition