Hyun-Jung Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hyun-Jung Lee returned 3 record(s).

Number	Title
1	Atomic layer deposited self-forming Ru-Mn diffusion barrier for seedless Cu interconnects
2	Atomic Layer Deposition of Ru Thin Films Using a New Beta-Diketonate Ru Precursor and NH₃ Plasma as a Reactant
3	A controlled growth of WN_x and WC_x thin films prepared by atomic layer deposition