Apurva Mehta Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Apurva Mehta returned 2 record(s).

Number	Title
1	CeO₂ Doping of Hf_0.5Zr_0.5O₂ Thin Films for High Endurance Ferroelectric Memories
2	Nanocrystallite Seeding of Metastable Ferroelectric Phase Formation in Atomic Layer-Deposited Hafnia-Zirconia Alloys