Bao Zhu Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Bao Zhu returned 3 record(s).

Number	Title
1	Atomic layer deposition of amorphous Ni-Ta-N films for Cu diffusion barrier
2	Plasma-Enhanced Atomic Layer Deposition of Cobalt Films Using Co(EtCp)2 as a Metal Precursor
3	Plasma-enhanced Atomic Layer Deposition of TaN Film and Its Resistance to Copper Diffusion