Inductively coupled plasma sources from Plasma ALD, LLC.


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Bao Zhu Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Bao Zhu returned 3 record(s).

NumberTitle
1Plasma-enhanced Atomic Layer Deposition of TaN Film and Its Resistance to Copper Diffusion
2Plasma-Enhanced Atomic Layer Deposition of Cobalt Films Using Co(EtCp)2 as a Metal Precursor
3Atomic layer deposition of amorphous Ni-Ta-N films for Cu diffusion barrier