Inductively coupled plasma sources from Plasma ALD, LLC.


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Hyoseok Song Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hyoseok Song returned 2 record(s).

NumberTitle
1Dielectric barrier characteristics of Si-rich silicon nitride films deposited by plasma enhanced atomic layer deposition
2The effect of plasma power on the properties of low-temperature silicon nitride deposited by RPALD for a gate spacer