Soohwan Jang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Soohwan Jang returned 2 record(s).

Number	Title
1	Band alignment of atomic layer deposited SiO2 and HfSiO4 with $(\bar{2}01)$ β-Ga2O3
2	Band alignment of Al₂O₃ with (-201) β-Ga₂O₃