Sylvain Bollaert Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sylvain Bollaert returned 3 record(s).

Number	Title
1	Impact of oxygen plasma postoxidation process on Al₂O₃/n-In_0.53Ga_0.47As metal-oxide-semiconductor capacitors
2	Improvement of interfacial and electrical properties of Al₂O₃/n-Ga_0.47In_0.53As for III-V impact ionization MOSFETs
3	Analog/RF Study of Self-aligned In_0.53Ga_0.47As MOSFET with Scaled Gate Length