Inductively coupled plasma sources from Plasma ALD, LLC.


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Kim Kisslinger Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kim Kisslinger returned 3 record(s).

NumberTitle
1Atomic Layer Deposition of Nanolayered Carbon Films
2Antiferromagnetism and p-type conductivity of nonstoichiometric nickel oxide thin films
3Comparison of Hafnium Dioxide and Zirconium Dioxide Grown by Plasma-Enhanced Atomic Layer Deposition for the Application of Electronic Materials