Yu-Sheng Chen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yu-Sheng Chen returned 2 record(s).

Number	Title
1	Junctionless Gate-All-Around pFETs Using In-situ Boron-Doped Ge Channel on Si
2	Ferroelectricity of HfZrO2 in Energy Landscape With Surface Potential Gain for Low-Power Steep-Slope Transistors