Inductively coupled plasma sources from Plasma ALD, LLC.


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Naomasa Miyatake Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Naomasa Miyatake returned 2 record(s).

NumberTitle
1Comparison between ZnO films grown by plasma-assisted atomic layer deposition using H2O plasma and O2 plasma as oxidant
2ZnO Thin Films Fabricated by Plasma-Assisted Atomic Layer Deposition