Alexander E. Rogozhin Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Alexander E. Rogozhin returned 4 record(s).

Number	Title
1	Plasma Enhanced Atomic Layer Deposition of Ruthenium Films Using Ru(EtCp)₂ Precursor
2	Microstructure and electrical properties of thin HfO₂ deposited by plasma-enhanced atomic layer deposition
3	Properties of plasma enhanced atomic layer deposited ruthenium thin films from Ru(EtCp)₂
4	Micro-Raman Spectroscopy for Monitoring of Deposition Quality of High-k Stack Protective Layer onto Nanowire FET Chips for Highly Sensitive miRNA Detection