Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Petro Deminskyi Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Petro Deminskyi returned 7 record(s).

NumberTitle
1Direct epitaxial nanometer-thin InN of high structural quality on 4H-SiC by atomic layer deposition
2Resolving Impurities in Atomic Layer Deposited Aluminum Nitride through Low Cost, High Efficiency Precursor Design
3Atomic layer deposition of InN using trimethylindium and ammonia plasma