Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Alexander Hardtdegen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Alexander Hardtdegen returned 2 record(s).

NumberTitle
1Forming-free metal-oxide ReRAM by oxygen ion implantation process
2Interfaces Formed by ALD Metal Oxide Growth on Metal Layers