Dong-Kwon Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Dong-Kwon Lee returned 2 record(s).

Number	Title
1	Growth of rutile-TiO₂ thin films via Sn doping and insertion of ultra-thin SnO₂ interlayer by atomic layer deposition
2	Plasma-enhanced atomic layer deposition of SnO₂ thin films using SnCl₄ and O₂ plasma