Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Erik Shirokoff Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Erik Shirokoff returned 2 record(s).

NumberTitle
1Atomic Layer Deposition Niobium Nitride Films for High-Q Resonators
2Atomic layer deposition of titanium nitride for quantum circuits