Bing-Zong Li Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Bing-Zong Li returned 3 record(s).

Number	Title
1	Ru thin film grown on TaN by plasma enhanced atomic layer deposition
2	Growth Kinetics and Crystallization Behavior of TiO₂ Films Prepared by Plasma Enhanced Atomic Layer Deposition
3	Diffusion barrier properties of TaN_x films prepared by plasma enhanced atomic layer deposition from PDMAT with N₂ or NH₃ plasma