Dae-Hong Ko Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Dae-Hong Ko returned 3 record(s).

Number	Title
1	Effect of plasma and heat treatment on silicon dioxide films by plasma-enhanced atomic layer deposition
2	Growth behavior and film properties of titanium dioxide by plasma-enhanced atomic layer deposition with discrete feeding method
3	Plasma-enhanced atomic layer deposition of low temperature silicon dioxide films using di-isopropylaminosilane as a precursor