Qing-Qing Sun Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Qing-Qing Sun returned 4 record(s).

Number	Title
1	Plasma enhanced atomic layer deposited platinum thin film on Si substrate with TMA pretreatment
2	Optical properties and bandgap evolution of ALD HfSiO_x films
3	Direct Growth of Al₂O₃ on Black Phosphorus by Plasma-Enhanced Atomic Layer Deposition
4	Resistive switching properties of plasma enhanced-ALD La₂O₃ for novel nonvolatile memory application